Tetrabutyl Orthosilicate (TBOS) (CAS 4766-57-8) is a high-purity organosilicon compound widely used in industrial and research applications. Key specifications include:
Tetrabutyl Orthosilicate serves as a versatile precursor in:
Process: TBOS is vaporized and reacted with oxygen in a CVD chamber to create uniform SiO2 layers. Result: Enhanced dielectric properties for microelectronics.
Application: Added to ceramic coatings at 2-5% concentration. Outcome: Improved thermal stability up to 600°C.
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